MEMS

abbr.

micro-electromechanical systems 微电子机械系统；

Photonic MEMS and structures
MEMS Varactors and Tunable Oscillators
RF MEMS switches and switch circuits
RF MEMS: Theory, Design, and Technology
MEMS power generator with transverse mode thin film PZT
RF-MEMS switches for reconfigurable integrated circuits
SU-8: a low-cost negative resist for MEMS
MICRO-ELECTRO-MECHANICAL-SYSTEMS (MEMS) AND FLUID FLOWS
M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures
TOPICAL REVIEW: Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emph...